Title :
Micromechatronics
Author :
Kuribayashi, Katsutoshi
Author_Institution :
Dept. of Mech. Eng., Yamaguchi Univ., Ube, Japan
Abstract :
Recent progress in micromechatronics is outlined. Micropumps, microvalves, micromobile robots, sensors for micromobile robots, microendoscopes and catheters, and micromanipulators and grippers are described
Keywords :
biomedical equipment; mechatronics; micromechanical devices; robots; catheters; grippers; microendoscopes; micromanipulators; micromechatronics; micromobile robots; micropumps; microvalves; Actuators; Etching; Fluid flow; Magnetic liquids; Micromachining; Micropumps; Microvalves; Pumps; Silicon; Valves;
Conference_Titel :
Emerging Technologies and Factory Automation, 1996. EFTA '96. Proceedings., 1996 IEEE Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-3685-2
DOI :
10.1109/ETFA.1996.573997
