Title :
A novel structure of AlN/SiO2/Si, AlN/Si SAW filter
Author :
Hoang, Thai V. ; Rey, Patrice ; Vaudaine, M.-H. ; Robert, Philippe ; Benech, Ph
Author_Institution :
Heterogeneous Silicon Integration Dept., CEA/LETI, Grenoble
Abstract :
This paper concerns the design and characterization of a novel structure surface acoustic wave (SAW) filter. The models for 2P and 3P configuration SAW filters are presented. The major subjects of interest for performance analysis of SAW filters are the transmission coefficient and reflection coefficient versus frequency. Network analyzer HP 8753E was used for this purpose. Comparisons between our novel structure and normal structure of different SAW filters are presented.
Keywords :
aluminium compounds; elemental semiconductors; network analysers; silicon; silicon compounds; surface acoustic wave filters; AlN-Si; AlN-SiO2-Si; SAW filter; network analyzer HP8753E; reflection coefficient; surface acoustic wave; transmission coefficient; Acoustic waves; Electric variables; Equations; Equivalent circuits; Fingers; Frequency; Pins; SAW filters; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Frequency Control Symposium, 2008 IEEE International
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-1794-0
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2008.4623070
