DocumentCode
2817511
Title
A novel structure of AlN/SiO2/Si, AlN/Si SAW filter
Author
Hoang, Thai V. ; Rey, Patrice ; Vaudaine, M.-H. ; Robert, Philippe ; Benech, Ph
Author_Institution
Heterogeneous Silicon Integration Dept., CEA/LETI, Grenoble
fYear
2008
fDate
19-21 May 2008
Firstpage
600
Lastpage
603
Abstract
This paper concerns the design and characterization of a novel structure surface acoustic wave (SAW) filter. The models for 2P and 3P configuration SAW filters are presented. The major subjects of interest for performance analysis of SAW filters are the transmission coefficient and reflection coefficient versus frequency. Network analyzer HP 8753E was used for this purpose. Comparisons between our novel structure and normal structure of different SAW filters are presented.
Keywords
aluminium compounds; elemental semiconductors; network analysers; silicon; silicon compounds; surface acoustic wave filters; AlN-Si; AlN-SiO2-Si; SAW filter; network analyzer HP8753E; reflection coefficient; surface acoustic wave; transmission coefficient; Acoustic waves; Electric variables; Equations; Equivalent circuits; Fingers; Frequency; Pins; SAW filters; Surface acoustic wave devices; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 2008 IEEE International
Conference_Location
Honolulu, HI
ISSN
1075-6787
Print_ISBN
978-1-4244-1794-0
Electronic_ISBN
1075-6787
Type
conf
DOI
10.1109/FREQ.2008.4623070
Filename
4623070
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