Effect of Mo layer on performance of AlN/Si SAW filter

This paper presents the effect of Mo thin layer on performance of AIN/Si SAW filter. This purpose is done by comparison between AIN/Mo/Si and AIN/Si SAW devices. The texture of AlN film is strongly influenced by the texture and roughness of the Si substrate and by the bottom Mo electrodes. The texture of AlN is evaluated by the full-width at half-maximum (FWHM) of x-ray rocking curves (XRD). The FWHM of AlN films are measured in different thicknesses of AlN films, with and without bottom Mo layer. Network analyzer HP 8753E is used for analysis of SAW filters performance. The influences of Mo layer on performance of SAW filter are analysed by model, simulation of SAW filter, by characterization of fabricated different devices. Using Mo layer below AlN would have subjects of interest which include increasing the gain of filter, saving die area that is the important and interesting application.