DocumentCode
2817926
Title
Low-noise bias reliability of AlInAs/GaInAs MODFETs with linearly graded low-temperature buffer layers grown on GaAs substrates
Author
Wakita, A.S. ; Rohdin, H. ; Robbins, V.M. ; Moll, N. ; Su, C.Y. ; Nagy, A. ; Basile, D.P.
Author_Institution
Hewlett-Packard Co., Palo Alto, CA, USA
fYear
1998
fDate
11-15 May 1998
Firstpage
223
Lastpage
226
Abstract
AlInAs/GaInAs MODEETs lattice-matched to InP have been shown to be reliable at low bias (Vds=0.75 to IV) for low-noise applications. Mean-times to failure (MTTF) from 105 to 107 hrs., based on various failure criteria, have been reported for lattice-matched FETs. To improve manufacturability of these FETs we have fabricated 0.1 μm T-gate AlInAs/GaInAs MODFETs on mismatched GaAs substrates by the insertion of a compositionally linearly graded low-temperature buffer (LGLTB) layer. In this work, we demonstrate that such FETs show comparable reliability at low bias under high temperature operating life (HTOL) tests to FETs on InP. Although the LGLTB layer is highly defective, there is no indication that the low-bias reliability of these devices is compromised. Our AlInAs/GaInAs MODFETS, grown on GaAs, have an extrapolated MTTF, based on Idss drift, exceeding 106 hours at a channel temperature of 125°C
Keywords
III-V semiconductors; aluminium compounds; gallium arsenide; high electron mobility transistors; indium compounds; semiconductor device reliability; semiconductor epitaxial layers; AlInAs-GaInAs; GaAs; GaAs substrates; MODFET; high temperature operating life tests; lattice-matched FETs; linearly graded low-temperature buffer layers; low-noise bias reliability; reliability; Buffer layers; FETs; Gallium arsenide; HEMTs; Indium phosphide; MODFETs; Manufacturing; Molecular beam epitaxial growth; Substrates; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 1998 International Conference on
Conference_Location
Tsukuba
ISSN
1092-8669
Print_ISBN
0-7803-4220-8
Type
conf
DOI
10.1109/ICIPRM.1998.712442
Filename
712442
Link To Document