Optical testing of microwave integrated circuits

Electro-optic wafer probing has many of the desired attributes of a wafer probing system. The authors detail the desired performance levels for a number of key parameters and indicates the capability of an electro-optic system. It is clear that electro-optic on-wafer probing already satisfies most of these requirements and that the implementation of faster pulse laser diodes will further advance its capabilities. A prototype system is described, and its present performance capabilities demonstrated