DocumentCode :
2818179
Title :
High power 1.48 μm DC-PBH LDs fabricated by all selective MOVPE (ASM) technology
Author :
Hosoda, T. ; Sasaki, Y. ; Sakata, Y. ; Komatsu, K. ; Hasumi, H.
Author_Institution :
ULSI Device Dev. Lab., NEC Corp., Shiga, Japan
fYear :
1998
fDate :
11-15 May 1998
Firstpage :
280
Lastpage :
283
Abstract :
The all selective metalorganic vapor-phase epitaxy (ASM) technique was adapted to 1.48 μm wavelength EDFA pumping lasers, for the first time. In this technique, not only double-heterostructure mesa stripe but also current blocking layers are grown by selective metalorganic vapor-phase epitaxy (MOVPE) with no semiconductor etching and no melt-back phenomenon, which results in precise dimension control. The fabricated device successfully demonstrated excellent light output power characteristics uniformity, such as 262 mW average output power at 1A with a standard deviation of only 1.4 mW for twenty laser chips
Keywords :
III-V semiconductors; MOCVD; gallium arsenide; gallium compounds; indium compounds; optical fibre amplifiers; semiconductor epitaxial layers; semiconductor lasers; vapour phase epitaxial growth; 1 A; 1.48 mum; 262 mW; DC-PBH laser diodes; EDFA pumping lasers; InGaAsP; all selective MOVPE; current blocking layers; dimension control; double-heterostructure mesa stripe; output power; DH-HEMTs; Epitaxial growth; Epitaxial layers; Erbium-doped fiber amplifier; Etching; Fabrication; Power amplifiers; Power generation; Pump lasers; Quantum well devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Indium Phosphide and Related Materials, 1998 International Conference on
Conference_Location :
Tsukuba
ISSN :
1092-8669
Print_ISBN :
0-7803-4220-8
Type :
conf
DOI :
10.1109/ICIPRM.1998.712457
Filename :
712457
Link To Document :
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