Method of manufacturing ceramic micro-features based on green machining

To solve the difficulty of machining ceramic micro-features, manufacturing methods based on green machining had been systematically researched using alumina. The research includes study of the formation law of machining gap while micro-machining was carried out in simple green ceramic, and effect of sintering on size of green ceramic micro-features. Through the processes of molding green ceramic, amending machining size, reserving machining gap, designing and preparing micro tool, and micro milling with planetary movement and sintering, twenty micro holes with diameter of 100μm and 200μm each and twenty-nine micro cavities with upper surface size of 500μm × 500μm had been successfully machined, and the final size error was less than 2%.