Range finding sensor in 90nm CMOS with bridge correlator based background light suppression

Within this work an integrated range finding single pixel sensor manufactured in a standard 90nm CMOS technology is presented. The sensor works on the time-of-flight principle obtaining the distance information out of the correlated sent and received signals. The implementation of a range-finding sensor in 90nm technology is using the most advanced process for a distance sensor up to now based on the bridge circuit. Background light suppression is inherently provided in the pixel sensor. The pixel facilitates a high fill factor accounting to 90% at an area of 50 × 64 μm² and has a power consumption of 2 μW. Measurement results show a standard deviation of 2 cm at 1.2 m covering the range from 0.2 to 3.2 m at 120 klx background illumination.