DocumentCode
2821089
Title
A 40nm CMOS 260kb SRAM-bitcell on-chip failure monitoring test scribe with integer-to-current converter
Author
Lhomme, Brice ; Carminati, Yan ; Borot, Bertrand ; Callen, Oliver ; Burdeau, Thierry ; Clerc, Sylvain
Author_Institution
STMicroelectronics, TRD, Crolles, France
fYear
2010
fDate
14-16 Sept. 2010
Firstpage
362
Lastpage
365
Abstract
Following the circuit integration trend, the process monitoring structures need to predict the production circuits reliability while keeping test time small and preserving the wafer area. The design presented monitors a 40nm CMOS bitcell failure evolution with supply voltage within a 260kb SRAM matrix and reports the number of fails through an integer-to-current converter. It approximates huge population bitcells reliability while reusing scribe lane test equipment. The design test time is 1s per voltage value; the design height is limited to 60um to fit in sawing region between circuits.
Keywords
CMOS memory circuits; SRAM chips; convertors; failure analysis; monitoring; CMOS SRAM-bitcell on-chip failure monitoring test; CMOS bitcell failure evolution; circuit integration trend; integer-to-current converter; process monitoring structure; production circuit reliability; size 40 nm; size 60 mum; supply voltage; time 1 s; wafer area; CMOS integrated circuits; Clocks; Driver circuits; Integrated circuit reliability; Monitoring; Random access memory; 40nm CMOS; SRAM VMIN; SRAM bitcell reliability; on-chip monitoring; process control screening;
fLanguage
English
Publisher
ieee
Conference_Titel
ESSCIRC, 2010 Proceedings of the
Conference_Location
Seville
ISSN
1930-8833
Print_ISBN
978-1-4244-6662-7
Type
conf
DOI
10.1109/ESSCIRC.2010.5619718
Filename
5619718
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