Title :
A 40nm CMOS 260kb SRAM-bitcell on-chip failure monitoring test scribe with integer-to-current converter
Author :
Lhomme, Brice ; Carminati, Yan ; Borot, Bertrand ; Callen, Oliver ; Burdeau, Thierry ; Clerc, Sylvain
Author_Institution :
STMicroelectronics, TRD, Crolles, France
Abstract :
Following the circuit integration trend, the process monitoring structures need to predict the production circuits reliability while keeping test time small and preserving the wafer area. The design presented monitors a 40nm CMOS bitcell failure evolution with supply voltage within a 260kb SRAM matrix and reports the number of fails through an integer-to-current converter. It approximates huge population bitcells reliability while reusing scribe lane test equipment. The design test time is 1s per voltage value; the design height is limited to 60um to fit in sawing region between circuits.
Keywords :
CMOS memory circuits; SRAM chips; convertors; failure analysis; monitoring; CMOS SRAM-bitcell on-chip failure monitoring test; CMOS bitcell failure evolution; circuit integration trend; integer-to-current converter; process monitoring structure; production circuit reliability; size 40 nm; size 60 mum; supply voltage; time 1 s; wafer area; CMOS integrated circuits; Clocks; Driver circuits; Integrated circuit reliability; Monitoring; Random access memory; 40nm CMOS; SRAM VMIN; SRAM bitcell reliability; on-chip monitoring; process control screening;
Conference_Titel :
ESSCIRC, 2010 Proceedings of the
Conference_Location :
Seville
Print_ISBN :
978-1-4244-6662-7
DOI :
10.1109/ESSCIRC.2010.5619718