DocumentCode :
2821176
Title :
ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307)
fYear :
1999
fDate :
15-18 March 1999
Abstract :
The following topics were dealt with: process characterization; RF characterization; sheet resistance measurements; oxide characterization; parameter extraction; power devices; device modelling
Keywords :
characteristics measurement; electric resistance measurement; insulating thin films; integrated circuit measurement; integrated circuit modelling; integrated circuit testing; power integrated circuits; power semiconductor devices; semiconductor device models; RF characterization; device modelling; oxide characterization; parameter extraction; power devices; process characterization; sheet resistance measurements;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures, 1999. ICMTS 1999. Proceedings of the 1999 International Conference on
Conference_Location :
Goteborg, Sweden
Print_ISBN :
0-7803-5270-X
Type :
conf
DOI :
10.1109/ICMTS.1999.766205
Filename :
766205
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2821176
بازگشت