DocumentCode
2821700
Title
A simple physical extraction method for RD-RS of asymmetric MOSFETs
Author
Blaum, Alfred ; Victory, James ; McAndrew, Colin C.
Author_Institution
Adv. Circuit Res. Lab.-Eur., Motorola Inc., Le Grand-Saconnex, Switzerland
fYear
1999
fDate
1999
Firstpage
141
Lastpage
146
Abstract
MOSFETs with different drain and source series resistance, RD and RS, are common both in medium and high power technologies and in deep submicron technologies. Proper modeling of asymmetric MOSFETs requires accurate characterization of RD-R S. This paper presents the concept and the results of a new, simple, and physical extraction technique to determine RD-R S purely based on experimental data. The method makes minimal assumptions about MOSFET drain current modeling
Keywords
MOSFET; electric resistance; power MOSFET; semiconductor device measurement; semiconductor device models; MOSFET drain current modeling; MOSFETs; asymmetric MOSFETs; drain series resistance; drain-source series resistance difference; modeling; physical extraction method; physical extraction technique; power technology; source series resistance; CMOS technology; Circuits; Conductivity; Data mining; Electrical resistance measurement; Hot carriers; MOS devices; MOSFETs; Medium voltage; Semiconductor device modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1999. ICMTS 1999. Proceedings of the 1999 International Conference on
Conference_Location
Goteborg
Print_ISBN
0-7803-5270-X
Type
conf
DOI
10.1109/ICMTS.1999.766232
Filename
766232
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