DocumentCode
2821829
Title
Simple technique for the measurement of thermal time constants of microbolometer structures
Author
Lambkin, Paul ; Folan, N. ; Lane, Bill
Author_Institution
Nat. Microelectron. Res. Centre, Cork, Ireland
fYear
1999
fDate
1999
Firstpage
179
Lastpage
183
Abstract
A straightforward electrical technique for determining the thermal time constant of microbolometer structures is presented. An impedance measurement of a microbolometer using an LCR meter shows that the phase lag/lead reaches a maximum as a function of frequency. It is shown that the frequency of maximum phase difference is simply related to the thermal time constant
Keywords
bolometers; infrared detectors; micromachining; microsensors; semiconductor device measurement; thermal analysis; thermal variables measurement; LCR meter; electrical technique; impedance measurement; maximum phase difference frequency; microbolometer structures; phase lag/lead; thermal time constant measurement technique; thermal time constants; Bolometers; Frequency; Optical arrays; Optical losses; Optical sensors; Resistors; Temperature; Thermal conductivity; Thermal resistance; Time measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1999. ICMTS 1999. Proceedings of the 1999 International Conference on
Conference_Location
Goteborg
Print_ISBN
0-7803-5270-X
Type
conf
DOI
10.1109/ICMTS.1999.766239
Filename
766239
Link To Document