DocumentCode
2821878
Title
Inclusion of substrate effects in the flyback method for BJT resistance characterisation
Author
MacSweeney, Dermot ; McCarthy, Kevin ; Mathewson, Alan ; Power, J.A. ; Kelly, S.C.
Author_Institution
Nat. Microelectron. Res. Centre, Univ. Coll. Cork, Ireland
fYear
1999
fDate
1999
Firstpage
194
Lastpage
199
Abstract
In this paper, the effect of the substrate interaction is examined for the RE flyback method which is commonly used to measure the emitter resistance of BJT devices. By considering the structure to be a combination of two devices, the measurement conditions can be understood better for different substrate configurations, giving improved confidence in the method
Keywords
bipolar transistors; electric resistance measurement; semiconductor device measurement; BJT devices; BJT resistance characterisation; RE flyback method; emitter resistance; flyback method; measurement conditions; substrate configurations; substrate effects; substrate interaction effects; Analysis of variance; BiCMOS integrated circuits; Bipolar transistors; Circuit synthesis; Educational institutions; Electrical resistance measurement; Frequency; Microelectronics; Performance gain; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1999. ICMTS 1999. Proceedings of the 1999 International Conference on
Conference_Location
Goteborg
Print_ISBN
0-7803-5270-X
Type
conf
DOI
10.1109/ICMTS.1999.766242
Filename
766242
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