Active electromagnetic-vibroacoustic control and optimization of microelectromechanical motion devices

This paper examines control of rotational permanent-magnet mini- and microscale electromechanical motion devices focusing on control of complex electromagnetic- electromechanical-vibroacoustic phenomena, energy conversion, torque production, motion dynamics, etc. The studied devices, integrated with controlling/driving ICs, are referenced as microelectromechanical systems (MEMS). We research design concepts and synthesize control algorithms to improve overall performance and enhance MEMS capabilities. Data-intensive analysis and coherent synthesis are accomplished by: (1) Examining device physics; (2) Deriving, validating and applying high-fidelity models; (3) Performing heterogeneous simulations, consistent experiments and sound evaluation; (4) Developing an adaptive performance-seeking design concept; (5) Implementing enabling minimal complexity control laws. It is possible to optimize performance and expand MEMS capabilities by designing sound closed-loop systems. The synthesized minimal complexity control laws ensure a near-balanced operation. Processing, controlling and driving circuitry with high-switching-frequency (~10 MHz) PWM amplifiers can be implemented by monolithic ICs. We control the duty cycle of transistors varying the phase voltages applied to the permanent-magnet synchronous minimotors. The results reported enable one to apply fundamental concepts to design high-performance mini- and microsystems. Complex electromagnetic, electromechanical and vibroacoustic phenomena are controlled and optimized in the behavioral domain. The experimental results are reported for proof-of-concept systems.