Title :
Parallel-beams/lever electrothermal out-of-plane actuator
Author :
Deladi, S. ; Krijnen, G. ; Elwenspoek, M.C.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combining numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and measurements are consistent if the temperature dependence of the properties of the polycrystalline Si is taken into account.
Keywords :
elemental semiconductors; finite element analysis; microactuators; silicon; silicon compounds; Si; analytical calculations; electrothermal actuator design; electrothermal actuator fabrication; electrothermal actuator modeling; microtribotester; numerical calculations; polycrystalline Si; temperature dependency; Actuators; Adhesives; Analytical models; Electrothermal effects; Fabrication; Materials testing; Microelectromechanical devices; Numerical simulation; Packaging; Temperature;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
Print_ISBN :
0-7803-7066-X
DOI :
10.1109/DTIP.2003.1287017
