Application of the "Multi Architecture Modeling" design method to system level MEMS simulation

Author

Schlegel, Milos ; Herrmann, Göran ; Müller, Dietmar

Author_Institution

Dept. of Electr. Eng. & Inf. Technol., Chemnitz Univ. of Technol., Germany

fYear

2003

fDate

5-7 May 2003

Firstpage

149

Lastpage

153

Abstract

The paper is focussing on high abstraction level CAD modeling of MEMS using a new methodical approach called "Multi Architecture Modeling" which makes it possible to simulate models at different abstraction levels together. The paper presents the MAM method and its application to the design of the experimental prototype "vibration sensor array". This system consists of a micromechanical sensor (array of laterally moving mass-spring systems, fabricated by SCREAM technology, intended for low cost applications in wear state recognition), an environmental model for the sensor, analog and digital signal processing.

Keywords

architectural CAD; microsensors; signal processing; CAD modeling; MEMS simulation; SCREAM technology; analog signal processing; digital signal processing; environmental sensor model; mass spin system array; micromechanical sensor; multi architecture modeling; prototype vibration sensor array; wear state recognition; Design methodology; Digital signal processing; Micromechanical devices; Prototypes; Sensor arrays; Sensor systems; Sensor systems and applications; Signal processing; Vibrations; Wearable sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on

Print_ISBN

0-7803-7066-X

Type

conf

DOI

10.1109/DTIP.2003.1287026

Filename

1287026