DocumentCode
2822554
Title
A new methodology for modeling MEMS Structures
Author
Zeng, Kaiping ; Liu, Zhenyu ; Korvink, Jan G.
Author_Institution
Inst. for Microsyst. Technol., Freiburg Univ., Germany
fYear
2003
fDate
5-7 May 2003
Firstpage
170
Lastpage
175
Abstract
In this work, we propose an innovative and general mathematical modeling framework with Lagrangian functions of multi-coupled energy domains for MEMS Structures on material frame. Due to the advantage of material descriptions of continua and the uniformity of Lagrangians for different physical domains, this framework simplifies the numerical analyses of MEMS structures.
Keywords
micromechanical devices; numerical analysis; Lagrangian functions; MEMS structure; mathematical modeling; multi coupled energy domains; numerical analysis; Chemistry; Electrodynamics; Electromagnetic fields; Lagrangian functions; Maxwell equations; Microelectromechanical devices; Micromechanical devices; Mutual coupling; Physics; Thermodynamics;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
Print_ISBN
0-7803-7066-X
Type
conf
DOI
10.1109/DTIP.2003.1287030
Filename
1287030
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