Title :
A new methodology for modeling MEMS Structures
Author :
Zeng, Kaiping ; Liu, Zhenyu ; Korvink, Jan G.
Author_Institution :
Inst. for Microsyst. Technol., Freiburg Univ., Germany
Abstract :
In this work, we propose an innovative and general mathematical modeling framework with Lagrangian functions of multi-coupled energy domains for MEMS Structures on material frame. Due to the advantage of material descriptions of continua and the uniformity of Lagrangians for different physical domains, this framework simplifies the numerical analyses of MEMS structures.
Keywords :
micromechanical devices; numerical analysis; Lagrangian functions; MEMS structure; mathematical modeling; multi coupled energy domains; numerical analysis; Chemistry; Electrodynamics; Electromagnetic fields; Lagrangian functions; Maxwell equations; Microelectromechanical devices; Micromechanical devices; Mutual coupling; Physics; Thermodynamics;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
Print_ISBN :
0-7803-7066-X
DOI :
10.1109/DTIP.2003.1287030
