Title :
The hierarchical HDL-based design of an integrated MEMS-CMOS oscillator
Author_Institution :
ARCES, Bologna Univ., Italy
Abstract :
A hierarchical and mixed-domain design approach is implemented within the Cadence® simulation framework and applied to an integrated MEMS-CMOS oscillator. Parameters concerning both the electronic circuit description at transistor level and the MEMS structure defined by its topology and dimensions, are available during simulation. This approach can lead to a full optimisation of the complete MEMS-CMOS sub-system, with a view to both electrical and mechanical specifications.
Keywords :
CMOS integrated circuits; integrated circuit design; micromechanical devices; oscillators; Cadence® simulation framework; HDL based design; MEMS structure; domain design approach; electrical specifications; electronic circuit description; integrated MEMS-CMOS oscillator; mechanical specifications; transistor level; CMOS technology; Circuit simulation; Design automation; Electronic circuits; Hardware design languages; Libraries; Mathematical model; Micromechanical devices; Oscillators; Packaging;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
Print_ISBN :
0-7803-7066-X
DOI :
10.1109/DTIP.2003.1287031
