Analysis, and optimization of a CMOS vertical thermal actuator

Author

Mohamed, Amal ; Elsimary, Hamed ; Ismail, Mohammed

Author_Institution

Electron. Res. Inst., Egypt

fYear

2003

fDate

5-7 May 2003

Firstpage

214

Lastpage

217

Abstract

An Electro-thermally and vertically driven MEMS actuator is analytically and practically examined which is based on the asymmetrical thermal expansion of the microstructure with the different shape of its beam. Analytical results are presented and compared with results obtained from finite element modeling (FEM). In previous work we introduced the use of such thermal actuator in micropositioning application to drive a variable capacitor as a part of an RF circuit. In this paper, issues related to the optimal design of the microstructure of the actuator are presented with its effect on the performance of the system, which lead to an improved design.

Keywords

CMOS integrated circuits; finite element analysis; microactuators; thermal expansion; CMOS vertical thermal actuator; FEM; RF circuit; capacitor; electrothermally driven MEMS actuator; finite element modeling; micropositioning application; microstructure; optimal design; optimization; thermal actuator; thermal expansion; Actuators; Capacitors; Circuits; Finite element methods; Micromechanical devices; Microstructure; Radio frequency; Semiconductor device modeling; Shape; Thermal expansion;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on

Print_ISBN

0-7803-7066-X

Type

conf

DOI

10.1109/DTIP.2003.1287039

Filename

1287039