DocumentCode :
2822997
Title :
New aspects of simulation in hot-embossing
Author :
Worgull, Matthias ; Heckele, Mathias
Author_Institution :
Inst. fur Mikrostrukturtech., Forschungszentrum Karlsruhe AC, Germany
fYear :
2003
fDate :
5-7 May 2003
Firstpage :
272
Lastpage :
274
Abstract :
Hot embossing is especially well suited for manufacturing small and medium volume series. However a wider diffusion of this process is currently seriously hampered by the lack of adequate simulation tools for process optimization and part design. This lack of simulation tools is becoming critical as the dimensions of the microstructures continuously shrink from micron and sub-micron towards nano-scales and as productivity requirements dictate the enlargement of formats to process larger numbers of devices in parallel. Having no macroscopic equivalent the micro hot embossing process cannot be described by simple down scaling of existing software tools like in injection molding. In this paper a first access is described how numerical simulation also can be applied to the hot embossing process.
Keywords :
embossing; injection moulding; micromachining; micromechanical devices; polymer melts; hot-embossing; injection molding; micro hot embossing process; microstructure; numerical simulation; Application software; Compression molding; Computational modeling; Embossing; Filling; Injection molding; Polymers; Softening; Software tools; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
Print_ISBN :
0-7803-7066-X
Type :
conf
DOI :
10.1109/DTIP.2003.1287051
Filename :
1287051
Link To Document :
بازگشت