Title :
Microfabrication of electroplated integrated chromium tips onto a silicon actuator
Author :
Lennon, E. ; Ayela, Fridiric
Author_Institution :
Centre de Recherches sur les Tres Basses Temperatures, CNRS, Grenoble, France
Abstract :
Electrodeposition has been claimed as an alternative and emerging technique devoted to the fabrication of tall microstructures. Various metals and alloys can be electroplated with micrometric dimensions and the lithography techniques allow the realizations of various patterns. We present a new process devoted to the microfabrication of a chromium tip from an electroplated microstructure. The aim of this work is the realization of a new scanning microscope to perform local thermal conductivity measurements of thin films.
Keywords :
chromium; crystal microstructure; electroplating; metallic thin films; thermal conductivity; Cr; Si; electrodeposition; electroplated integrated chromium tips; electroplated microstructure; lithography technique; microfabrication; micrometric dimension; microstructures; scanning microscope; silicon actuator; thermal conductivity; thin films; Actuators; Chromium; Conductivity measurement; Fabrication; Lithography; Microscopy; Microstructure; Performance evaluation; Silicon; Thermal conductivity;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
Print_ISBN :
0-7803-7066-X
DOI :
10.1109/DTIP.2003.1287067
