DocumentCode
2823395
Title
A MEMS-based coupled-cavity tunable optical filter
Author
Gheith, M. ; Hussein, A. ; Madkour, K. ; Saadany, S. ; Khalil, D.
Author_Institution
MEMSCAP, Cairo, Egypt
Volume
2
fYear
2003
fDate
27-30 Dec. 2003
Firstpage
1026
Abstract
In this or we present the design of the first MEMS based tunable optical filter that satisfies a 20dB to 3dB bandwidth ratio of only 3. The design is based on the coupled cavity approach and its tuning is achieved using electrostatic actuation. The electro mechanical simulation using the finite element method (FEM) shows a settling time in the order of tens of microseconds.
Keywords
finite element analysis; micro-optics; micromechanical devices; optical filters; wafer bonding; MEMS; coupled-cavity tunable optical filter; electro mechanical simulation; electrostatic actuation; finite element method; Biomembranes; Coatings; Dielectrics; Finite element methods; Micromechanical devices; Mirrors; Optical coupling; Optical filters; Silicon; Wavelength division multiplexing;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 2003 IEEE 46th Midwest Symposium on
ISSN
1548-3746
Print_ISBN
0-7803-8294-3
Type
conf
DOI
10.1109/MWSCAS.2003.1562463
Filename
1562463
Link To Document