Title :
A MEMS-based coupled-cavity tunable optical filter
Author :
Gheith, M. ; Hussein, A. ; Madkour, K. ; Saadany, S. ; Khalil, D.
Author_Institution :
MEMSCAP, Cairo, Egypt
Abstract :
In this or we present the design of the first MEMS based tunable optical filter that satisfies a 20dB to 3dB bandwidth ratio of only 3. The design is based on the coupled cavity approach and its tuning is achieved using electrostatic actuation. The electro mechanical simulation using the finite element method (FEM) shows a settling time in the order of tens of microseconds.
Keywords :
finite element analysis; micro-optics; micromechanical devices; optical filters; wafer bonding; MEMS; coupled-cavity tunable optical filter; electro mechanical simulation; electrostatic actuation; finite element method; Biomembranes; Coatings; Dielectrics; Finite element methods; Micromechanical devices; Mirrors; Optical coupling; Optical filters; Silicon; Wavelength division multiplexing;
Conference_Titel :
Circuits and Systems, 2003 IEEE 46th Midwest Symposium on
Print_ISBN :
0-7803-8294-3
DOI :
10.1109/MWSCAS.2003.1562463
