Title :
Manufacturing of micro electrodes using ultra sonic aided electrochemical machining
Author :
Feng-Tsai Wang ; Chen-Siang Hsu ; Shyu, R.F. ; Ho, C.T.
Author_Institution :
Dept. of Mech. Manuf Eng., Nat. Huwei Inst. of Technol., Yunlin, Taiwan
Abstract :
In this study, a two-steps composite processing technology combining WEDG process, ultra sonic, and electrolysis machining is adapted to cut micro electrodes. Rod electrode of diameter 3.0 mm is cut to be 0.15 mm on wire-EDM machine in first step. A faster metal removal rate can be achieved on anode by ultra sonic aided electrolysis machining. The diameter of the microelectrode could be machined to 10 μm in second step. Results have been revealed fine electrodes could be processed to a desired smaller size using proposed two-steps composite machining technology. With higher L/D ratio, the processed fine electrodes can be used for processing micro holes, deep micro holes, micro slots and manufacturing of micro nozzles.
Keywords :
electrical discharge machining; electrochemical electrodes; electrochemical machining; electrolysis; microelectrodes; micromechanical devices; ultrasonic machining; 0.15 mm; 3.0 mm; MEMS; deep microholes; metal removal rate; microelectrodes; microholes; micronozzles; microslots; rod electrode; two-steps composite processing technology; ultra sonic aided electrochemical machining; ultra sonic aided electrolysis machining; wire-EDM machine; Anodes; Copper; Design engineering; Electrochemical machining; Electrochemical processes; Electrodes; Manufacturing; Materials science and technology; Micromechanical devices; Wire;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
Print_ISBN :
0-7803-7066-X
DOI :
10.1109/DTIP.2003.1287076