Title :
Feasibility of a flip chip approach to integrate an IR filter and an IR detector in a future gas detection cell
Author :
Fonseca, L. ; Cabruja, E. ; Calaza, C. ; Rubio, R. ; Santander, J. ; Figueras, E. ; Gràcia, I. ; Cané, C. ; Moreno, M. ; Marco, S.
Author_Institution :
Centro Nacional de Microelectron., Bellaterra, Spain
Abstract :
In this work we have studied the feasibility of integrating an IR filter and IR detector by means of a flip chip technique. This filter and detector combination should be the heart of a future gas detection cell based on infrared absorption. In our case the filter is a surface micromachined Fabry-Perot interferometer, and the IR detector is a bulk micromachined thermopile.
Keywords :
Fabry-Perot interferometers; flip-chip devices; infrared detectors; micromachining; optical filters; thermopiles; IR detector; IR filter integration; flip chip technique; gas detection cell; infrared absorption; micromachined thermopile; surface micromachined Fabry-Perot interferometer; Biomedical optical imaging; Electromagnetic wave absorption; Flip chip; Infrared detectors; Optical filters; Optical interferometry; Optical refraction; Optical resonators; Optical sensors; Silicon;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
Print_ISBN :
0-7803-7066-X
DOI :
10.1109/DTIP.2003.1287078
