Title :
New micro-actuator for high density recording
Author_Institution :
ITD, Corenc, France
Abstract :
The purpose of this paper is to present a new microactuator, which has a very high driving force, enabling it to make a very robust microactuator, as well as a sealed structure, preventing issues of liquid or particles contamination.
Keywords :
magnetic recording; microactuators; high density recording; micro-actuator; Bonding; Capacitance; Electrostatics; Magnetic cores; Magnetic heads; Magnetic recording; Microactuators; Micromotors; Robustness; Silicon;
Conference_Titel :
Asia-Pacific Magnetic Recording Conference, 2000. APMRC 2000
Conference_Location :
Tokyo, Japan
Print_ISBN :
0-7803-6254-3
DOI :
10.1109/APMRC.2000.898964
