Title :
Using emulation to validate a cluster tool simulation model
Author :
LeBaron, H. Todd ; Hendrickson, Ruth Ann
Author_Institution :
AutoSimulations Div., Brooks Autom. Inc., Bountiful, UT, USA
Abstract :
Getting the most productivity per square foot of clean room space is a common goal for today´s semiconductor fabs. Cluster tool throughput is an important factor in a tool´s productivity index. Maximizing and accurately predicting throughput is a high priority in the cluster tool market. This paper presents a flexible and sufficiently accurate cluster tool simulation model. The simulation model can run as an emulator, using the real-world cluster tool scheduler (CTS), or as a stand-alone simulation model using a rule-based scheduler. The process of validating the stand-alone simulation rule-based scheduler against the actual cluster tool scheduler is discussed. A comparison between the two schedulers is detailed. Finally, the results, benefits, and limitations of the simulation model are presented
Keywords :
clean rooms; digital simulation; electronic engineering computing; production control; production engineering computing; semiconductor device manufacture; clean room space; cluster tool simulation model validation; cluster tool throughput; emulation; productivity index; productivity per square foot; real-world cluster tool scheduler; rule-based scheduler; semiconductor fabrication; stand-alone simulation model; Emulation; Foot; Medical simulation; Predictive models; Productivity; Robotics and automation; Robots; Semiconductor device modeling; Silicon; Throughput;
Conference_Titel :
Simulation Conference, 2000. Proceedings. Winter
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-6579-8
DOI :
10.1109/WSC.2000.899119
