DocumentCode
2825478
Title
Analysis of the nonstationary behavior of a wafer fab during product mix changes
Author
Dümmler, Mathias A.
Author_Institution
Inst. of Comput. Sci., Wurzburg Univ., Germany
Volume
2
fYear
2000
fDate
2000
Firstpage
1436
Abstract
This paper presents a series of experiments that were conducted to investigate in the nonstationary behavior of a wafer fab after changes in product mix. The experiments were performed using a simulation model of the front end area of an existing semiconductor fab. We observe how short-term increases in wafer starts of a product influence the cycle time and WIP of this product and of the other products. It is examined how the fab recovers from such production surges under different dispatch rules. We also investigate how different lot start mechanisms affect the short term fab performance. More specifically, we observe the effects of changing the mix of the lots started into the fab on a weekly basis. Finally, we compare two alternative ways of releasing lots into the fab: the first is to distribute lot starts evenly over a given period, e.g. a week, and the other is to start all lots at the beginning of the period
Keywords
digital simulation; electronic engineering computing; production engineering computing; semiconductor device manufacture; WIP; cycle time; dispatch rules; front end area; lot start mechanisms; nonstationary behavior; product mix changes; production surges; semiconductor fabrication; short term fabrication performance; simulation model; wafer fabrication; Computational modeling; Computer science; Electric breakdown; Measurement; Production planning; Semiconductor device breakdown; Semiconductor device modeling; Steady-state; Surges; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation Conference, 2000. Proceedings. Winter
Conference_Location
Orlando, FL
Print_ISBN
0-7803-6579-8
Type
conf
DOI
10.1109/WSC.2000.899122
Filename
899122
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