Title :
Simulation based decision support for future 300 mm automated material handling
Author :
Schulz, Markus ; Stanley, T.D. ; Sturm, R.
Author_Institution :
Semicond.. 300, Dresden
Abstract :
Integrated factory models of semiconductor fabrication facilities allow conclusions to be drawn on the impact of a given automated material handling system (AMHS) and interactions between material flow and factory performance. A generic model of a 300 mm wafer fabrication facility has been built to support decisions to be made in terms of dimensioning of the potential AMHS solutions
Keywords :
computer integrated manufacturing; decision support systems; digital simulation; materials handling; semiconductor device manufacture; automated material handling; factory performance; integrated factory models; material flow; semiconductor fabrication facilities; simulation based decision support; wafer fabrication facility; Discrete event simulation; Fabrication; Manufacturing automation; Materials handling; Production facilities; Productivity; Semiconductor device manufacture; Semiconductor device modeling; Transportation; Vehicles;
Conference_Titel :
Simulation Conference, 2000. Proceedings. Winter
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-6579-8
DOI :
10.1109/WSC.2000.899134
