• DocumentCode
    2826251
  • Title

    Research and Manufacture of the Micromechanical Relay for VHF Devices

  • Author

    Timoshenkov, S.P. ; Kalugin, V.V. ; Klochko, A.V. ; Kalugina, I.V. ; Zotov, S.A. ; Prokop´ev, E.P.

  • Author_Institution
    Moscow Inst. of Electron. Technol.
  • Volume
    2
  • fYear
    2006
  • fDate
    Sept. 2006
  • Firstpage
    581
  • Lastpage
    582
  • Abstract
    Technological processes of manufacturing of the micromechanical relay with an electrostatic principle of management are developed. The technological scheme of manufacturing of the micromechanical relay with use of a group way of assembly is realized. The results received are supposed to be used in manufacturing of the VHF devices
  • Keywords
    VHF devices; electron device manufacture; electrostatics; microassembling; microrelays; VHF device; electrostatic principle; group way of assembly; micromechanical relay manufacturing; technological process; Assembly; Electrostatics; Manufacturing processes; Micromechanical devices; Microwave devices; Physics; Region 8; Relays; Technology management; VHF devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave and Telecommunication Technology, 2006. CriMiCO '06. 16th International Crimean Conference
  • Conference_Location
    Sevastopol, Crimea
  • Print_ISBN
    966-7968-92-8
  • Electronic_ISBN
    966-7968-92-8
  • Type

    conf

  • DOI
    10.1109/CRMICO.2006.256116
  • Filename
    4023398
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2826251