Title :
Development of Piezo-Operated Dielectric Phase Shifter
Author :
Poplavko, Y. ; Golubeva, I. ; Prokopenko, Y.
Author_Institution :
Nat. Tech. Univ. of Ukraine
Abstract :
Possible alternative of low loss and highly tunable MEMS phase shifter is discussed. Dielectric or metallic parts of device should have the piezo-dirigible air gap between them. Important is to provide a strong perturbation in electro magnetic field in the region influenced by the mechanical control. Energy distribution within the device is controlled by piezoelectric actuator, and can be described as a change in effective dielectric permittivity (epsiveff). Some of highly tunable piezoelectric RF MEMS devices are realized experimentally
Keywords :
electromagnetic fields; micromechanical devices; permittivity; phase shifters; piezoelectric actuators; dielectric part; dielectric permittivity; electro magnetic field; energy distribution; mechanical control; metallic part; perturbation; piezodirigible air gap; piezoelectric actuator control; tunable RF MEMS phase shifter; Dielectric substrates; Electrodes; Ferroelectric materials; Frequency; Microwave devices; Millimeter wave radar; Phase shifters; Radiofrequency microelectromechanical systems; Semiconductor materials; Tuning;
Conference_Titel :
Microwave and Telecommunication Technology, 2006. CriMiCO '06. 16th International Crimean Conference
Conference_Location :
Sevastopol, Crimea
Print_ISBN :
966-7968-92-8
Electronic_ISBN :
966-7968-92-8
DOI :
10.1109/CRMICO.2006.256123
