DocumentCode :
2827514
Title :
Microwave Method for Measuring Conductivity of Nanometer Metal Films in Multilayer Structures
Author :
Usanov, D. ; Skripal, A. ; Abramov, A. ; Bogolubov, A.
Author_Institution :
Saratov State Univ.
Volume :
2
fYear :
2006
fDate :
Sept. 2006
Firstpage :
773
Lastpage :
774
Abstract :
The method for measuring conductivity of nanometer metal films in multilayer structures in thicknesses range from units till thousands nanometers from electromagnetic wave reflectance spectra is presented
Keywords :
electrical conductivity measurement; metallic thin films; microwave measurement; multilayers; reflectivity; conductivity measurement; electromagnetic wave reflectance spectra; microwave method; multilayer structures; nanometer metal films; Conductive films; Conductivity measurement; Electromagnetic measurements; Electromagnetic scattering; Microwave measurements; Microwave theory and techniques; Nonhomogeneous media; Optical films; Reflectivity; Thickness measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave and Telecommunication Technology, 2006. CriMiCO '06. 16th International Crimean Conference
Conference_Location :
Sevastopol, Crimea
Print_ISBN :
966-7968-92-8
Electronic_ISBN :
966-7968-92-8
Type :
conf
DOI :
10.1109/CRMICO.2006.256195
Filename :
4023477
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2827514
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