A new test structure for measuring on-chip cross-coupling capacitances

We present a new test structure for measuring on-chip cross-coupling capacitance by means of crosstalk-induced supply currents. The key advantage of the proposed approach over existing charge-based capacitance measurements (CBCMs) based on cross talk is that the victim line is kept at a constant voltage level, thus avoiding short-circuit currents and enabling complete compensation of charge redistribution effects. We present preliminary experimental results obtained from a 0.13 μm CMOS implementation.