Title :
Transverse-field bandgap modulation on graphene nanoribbon transistors by double-self-aligned spacers
Author :
Tung, Lieh-Ting ; Mateus, M. Veronica ; Kan, Edwin C.
Author_Institution :
Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
Abstract :
Independently-driven tri-gate graphene nanoribbon transistors were implemented by CMOS-compatible double-self-aligned spacer lithography, which effectively suppresses the line edge roughness and width variation. The consistent electrical characteristics show bandgap modulation with transverse electrical fields and ambipolar conduction with perpendicular fields in graphene film.
Keywords :
energy gap; fullerene devices; graphene; nanoribbons; transistors; C; CMOS-compatible double-self-aligned spacer lithography; ambipolar conduction; double-self-aligned spacers; electrical characteristics; graphene film; independently-driven tri-gate graphene nanoribbon transistors; line edge roughness; perpendicular fields; transverse electrical fields; transverse-field bandgap modulation; width variation; Educational institutions; Electrostatics; FinFETs; Logic gates; Manganese; Photonic band gap;
Conference_Titel :
Device Research Conference (DRC), 2012 70th Annual
Conference_Location :
University Park, TX
Print_ISBN :
978-1-4673-1163-2
DOI :
10.1109/DRC.2012.6256978