DocumentCode
283132
Title
Ion beam processes for ion implantation and surface modification
Author
Ingram, David C.
Author_Institution
Whickham Ion Beam Syst. Ltd., Ind. Res. Labs., Durham Univ., UK
fYear
1988
fDate
32225
Firstpage
42675
Abstract
Since the successful introduction of ion implantation into the semiconductor industry, ion beam technology has become a standard process tool in that industry. Other industries are now beginning to use ion implantation and the author discusses some of these applications and the process of ion implantation. Applications in the aerospace industry and optics industry are highlighted
Keywords
electronic equipment manufacture; ion beam applications; ion implantation; aerospace industry; ion beam technology; ion implantation; optics industry; semiconductor industry; surface modification;
fLanguage
English
Publisher
iet
Conference_Titel
High Energy Beam Processes for Industrial Applications, IEE Colloquium on
Conference_Location
Middlesborough
Type
conf
Filename
209007
Link To Document