MBE growth of GaAs on Si at Thomson

Author

Charasse, M.N. ; Georgakilas, A. ; Barbier, E. ; Chazelas, J. ; Pocholle, J.P. ; Hirtz, J.P. ; Blanck, H. ; Laviron, M. ; Siejka, J. ; Heral, H. ; Rocher, A.

Author_Institution

Thomson-CSF-LCR-Domaine de Corbeville, Orsay, France

fYear

1988

fDate

32230

Firstpage

42401

Lastpage

42404

Abstract

Three difficulties have been encountered in the growth of high quality GaAs films on Si substrates. Firstly, the epitaxy of a polar material on a nonpolar substrate can lead to antiphase domains. However, it seems to be possible to obtain antiphase-free growths even for double domain Si substrates which have one monolayer steps on their surface. Secondly, the 4% lattice mismatch between GaAs and Si results in a high density of dislocations: 10¹² cm^-2 at the interface and threading dislocations in the range of 10⁶ cm ^-2. Thirdly, the different thermal expansion of GaAs and Si leads to a concave curvature of the sample, and microcracks in GaAs when the GaAs thickness is greater than 3 μm. The authors present the work which has been done at Thomson on the growth optimization and the characterization of GaAs and Si grown by MBE, the results on MESFET structures, the integration of MOSFET and MESFET on the same Si substrate and the realization of GaAs optical waveguides on Si

Keywords

III-V semiconductors; Schottky gate field effect transistors; elemental semiconductors; gallium arsenide; molecular beam epitaxial growth; optical waveguides; semiconductor epitaxial layers; semiconductor growth; silicon; substrates; thermal expansion; GaAs on Si; GaAs optical waveguides on Si; GaAs thin films; GaAs-Si; MBE growth; MESFET structures; Si; Si substrate; Thomson; characterization; concave curvature; different thermal expansion; difficulties; growth of high quality GaAs films; growth optimization; heteroepitaxy; lattice mismatch; semiconductors; threading dislocations;

fLanguage

English

Publisher

iet

Conference_Titel

GaAs on Si, IEE Colloquium on

Conference_Location

London

Type

conf

Filename

209033