Title :
Ultrasonic linear motor for a high precision X-Y stage
Author :
Mori, Kenji ; Kumagae, Tomoko ; Hirai, Hirokazu
Author_Institution :
Hitachi Ltd., Ibaraki, Japan
Abstract :
Experiments on a mechanical configuration and control system for an ultrasonic linear motor for a high precision X-Y stage were conducted, and a velocity up to 100 mm/s and a positioning resolution of 0.016 mu m were obtained. The motor consists of a piezoelectric drive element using multilayer piezoelectric ceramic actuators. To realize both long-distance drive and very precise positioning, the ultrasonic linear motor has a coarse mode and a fine mode. The coarse mode is a friction drive mechanism and the fine mode is a direct-drive mechanism. The control system selects each mode according to the difference between a present position and an objective position.<>
Keywords :
electric drives; linear motors; piezoelectric devices; position control; small electric machines; ultrasonic devices; coarse mode; control system; direct-drive mechanism; fine mode; friction drive mechanism; high precision X-Y stage; long-distance drive; mechanical configuration; multilayer piezoelectric ceramic actuators; piezoelectric drive element; positioning resolution; ultrasonic linear motor; AC generators; Contracts; Drives; Force control; Frequency synthesizers; Friction; Large Hadron Collider; Piezoelectric devices; Voltage;
Conference_Titel :
Ultrasonics Symposium, 1989. Proceedings., IEEE 1989
Conference_Location :
Montreal, Que., Canada
DOI :
10.1109/ULTSYM.1989.67066
