Title :
Resistivity behaviour of ultra thin Pd films with respect to temperature for sensing applications
Author :
Vyas, J.C. ; Katti, V.R. ; Gupta, S.K. ; Yakhmi, J.V.
Author_Institution :
Div. of Tech. Phys. & Proto-type Eng., Bhabha Atomic Res. Centre, Mumbai, India
Abstract :
Ultra thin Pd films (5-30 nm) deposited by RF sputtering have shown fast and detectable responses for low concentrations of H2 gas (0.3-4%) and compounds containing hydrogen such as ammonia, methanol (∼100 ppm mixtures in air) at different temperatures. These films have been characterized in dynamic temperature programmed and static conditions for 100-300°C range, in air with respect to their resistivity. The electrical resistivity of Pd films gets modified on exposure to such gas mixtures and measured changes are reported. The observed changes in resistivity on exposure to above gas mixtures are much larger (more then by an order) then earlier reported results in literature.
Keywords :
electrical resistivity; gas sensors; metallic thin films; palladium; sputtered coatings; 100 to 300 degC; 5 to 30 nm; H2; NH3; Pd; RF sputtering; ammonia; electrical resistivity; gas mixtures; gas sensors; hydrogen; methanol; sensing applications; static conditions; ultra thin Pd films; Conductivity; Electric resistance; Electrical resistance measurement; Hydrogen; Methanol; Radio frequency; Sputtering; Temperature distribution; Temperature measurement; Temperature sensors;
Conference_Titel :
Intelligent Sensing and Information Processing, 2004. Proceedings of International Conference on
Print_ISBN :
0-7803-8243-9
DOI :
10.1109/ICISIP.2004.1287648