DocumentCode
2841007
Title
Mode selective probing method of micro trench structure using optically trapped probe
Author
Takaya, Y. ; Michihata, M. ; Hayashi, Teruaki ; Washitani, T.
Author_Institution
Dept. of Mech. Eng., Osaka Univ., Suita, Japan
fYear
2012
fDate
29-31 Oct. 2012
Firstpage
1
Lastpage
6
Abstract
Probing techniques using the optically trapped probe with selective mode such as circular motion mode and SWS sensing mode are presented. The feasibility of both probing modes is confirmed by dimensional measurements of micro trench structure which is performed using the originally developed measurement system based on a CMM.
Keywords
coordinate measuring machines; micromechanical devices; CMM; SWS sensing mode; circular motion mode; dimensional measurements; measurement system; micro trench structure; mode selective probing method; optically trapped probe; Charge carrier processes; Measurement by laser beam; Optical device fabrication; Optical sensors; Optical surface waves; Probes; Surface waves; CMM; micro trench structure; optically trapped probe; probing mode;
fLanguage
English
Publisher
ieee
Conference_Titel
Optomechatronic Technologies (ISOT), 2012 International Symposium on
Conference_Location
Paris
Print_ISBN
978-1-4673-2875-3
Type
conf
DOI
10.1109/ISOT.2012.6403241
Filename
6403241
Link To Document