• DocumentCode
    2841254
  • Title

    Automatic frequency control in chemical etching of quartz crystal blanks

  • Author

    Sauerland, Franz L.

  • Author_Institution
    Transat Corp., Solon, OH, USA
  • fYear
    1990
  • fDate
    23-25 May 1990
  • Firstpage
    246
  • Lastpage
    250
  • Abstract
    A method and system for measuring the resonance frequency of piezoelectric resonators in conductive fluids are described. One of its applications is in the chemical etching of quartz crystal blanks, where it can be used to monitor and control either the etch rate of the etchant or the etching of blanks to a targeted thickness or frequency. The system is composed of a crystal etch monitor in conjunction with special electrodes that are designed to take account and advantage of the conductive nature of the etchant. It can etch a load of blanks or a monitor blank different from the etch load but immersed in the same etchant. When the blank reaches a predetermined target, an etch-termination signal is triggered that can be used to alert an operator or to initiate action for automatic etch termination
  • Keywords
    automatic frequency control; crystal resonators; etching; frequency measurement; process control; quartz; AFC; SiO2 crystal resonators; automatic etch termination; automatic frequency control; chemical etching; conductive fluids; crystal etch monitor; etch rate; etch-termination signal; etching of blanks; piezoelectric resonators; quartz crystal blanks; resonant frequency monitoring; special electrodes; targeted thickness; Automatic frequency control; Chemicals; Conductivity measurement; Electrodes; Etching; Frequency measurement; Monitoring; Resonance; Resonant frequency; Thickness control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control, 1990., Proceedings of the 44th Annual Symposium on
  • Conference_Location
    Baltimore, MD
  • Type

    conf

  • DOI
    10.1109/FREQ.1990.177504
  • Filename
    177504