Title :
Novel types of guided SAW reflectors for micro-resonators
Author :
Golan, G. ; Griffel, G. ; Seidman, A. ; Croitoru, N.
Author_Institution :
Dept. of Electron Devices & Mater., Tel-Aviv Univ., Ramat-Aviv, Israel
Abstract :
Surface acoustic waves (SAWs) for micrograting reflectors are characterized. Based on the perturbation theory, eight different types of structures on an acoustic waveguide are analyzed. Results of simulations of all eight types of corrugation structures are evaluated in order to find the least leaky waveguide, the most efficient reflector (with minimum necessary perturbations), and the optimal mode shape for improved performances. General design curves are presented in order to illustrate the behavior of the incident and reflected waves under a variety of structural conditions. Analytic expressions for the calculations of the mode amplitude and mode shape, and for general acoustic corrugations are derived. Simulation results are presented
Keywords :
acoustic wave reflection; crystal resonators; surface acoustic wave devices; surface acoustic wave filters; acoustic corrugations; acoustic waveguide; design curves; least leaky waveguide; micro-resonators; micrograting reflectors; mode amplitude; mode shape; most efficient reflector; optimal mode shape; perturbation theory; types of corrugation structures; Acoustic devices; Acoustic waveguides; Acoustic waves; Microcavities; Optical surface waves; Optical waveguides; Shape; Surface acoustic wave devices; Surface acoustic waves; Waveguide theory;
Conference_Titel :
Frequency Control, 1990., Proceedings of the 44th Annual Symposium on
Conference_Location :
Baltimore, MD
DOI :
10.1109/FREQ.1990.177514
