Microsystem development using the TQM design methodology

Equilibrium between technology for microelectronic systems and their theory is constantly sought. However, it appears that technology advances are ahead of their underlying theory. The paper describes formalism for the development of microelectronic systems, called microsystems, to include mechanical and optoelectronic components that restore the necessary balance. Using this formalism, we introduce a TQM design methodology to emphasize the importance of integrated design, test, and reliability. The methodology is illustrated using a microsystem developed for biometrics applications.