Theoretical aspects and derived design rules for optical angle position sensing of tilt mirrors

Tiltable mirrors, which can be produced in small form factors via MOEMS technology, are widely used for many applications. An independent, accurate and fast feedback of the angle position is demanded by industry. Simple optical tilt angle sensing layouts are analytically described. The concept is based on measuring tilt angle dependent intensity or intensity changes. The performance limits of each layout are evaluated and derived design rules for best linear behavior are given.