Annealing effect of niobium pentoxide for low voltage electrowetting on dielectric (EWOD)

In this paper, the high dielectric constants for Nb₂O₅ (~25.5) were deposited by a RF reactive magnetron sputtering and respectively annealed at 400 °C O₂ ambiance for 30 min in a conventional furnace. Based on the results, an electrowetting optical deflector (EOD) filled with the water (1% sodium dodecyl sulfate (SDS)) and dodecane was fabricated and tested, and the contact angle of the inclined liquid surface on the left and right sidewall can be varied about 70° at 9 V operating voltage. This study provides a practical way to fabricate a high dielectric constant layer for low voltage electrowetting on dielectric (EWOD) application.