Title :
A GENERIC METHOD TO DEVELOP A DEFECT MONITORING SYSTEM FOR IC PROCESSES
Author :
Bruls, E.M.J.G. ; Camerik, F. ; Kretschman, H.J. ; Jess, J.A.G.
Keywords :
Application specific integrated circuits; Current measurement; Data processing; Electrical resistance measurement; Failure analysis; Laboratories; Mass production; Monitoring; Process control; Testing;
Conference_Titel :
Test Conference, 1991, Proceedings., International
Print_ISBN :
0-8186-9156-5
DOI :
10.1109/TEST.1991.519513
