DocumentCode
2842673
Title
A GENERIC METHOD TO DEVELOP A DEFECT MONITORING SYSTEM FOR IC PROCESSES
Author
Bruls, E.M.J.G. ; Camerik, F. ; Kretschman, H.J. ; Jess, J.A.G.
fYear
1991
fDate
26-30 Oct 1991
Firstpage
218
Keywords
Application specific integrated circuits; Current measurement; Data processing; Electrical resistance measurement; Failure analysis; Laboratories; Mass production; Monitoring; Process control; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Test Conference, 1991, Proceedings., International
ISSN
1089-3539
Print_ISBN
0-8186-9156-5
Type
conf
DOI
10.1109/TEST.1991.519513
Filename
519513
Link To Document