The general variational formulas for capacitance parameter extraction

To obtain second order accuracy using the first order data for the capacitance parameter extraction, a set of new generalized variational formulas are presented in this paper. They are complete since they are valid not only for self-capacitances, but also for mutual capacitances. A more general variational formula is derived to account for the asymmetrical elastance matrix case. By these novel formulas the computational accuracy can be significantly improved compared to the conventional direct capacitance extraction method.