Title : 
AN APPROACH TO CHIP-INTERNAL CURRENT MONITORING AND MEASUREMENT USING AN ELECTRON BEAM TESTER
         
        
            Author : 
Helmreich, K. ; Nagel, P. ; Wolz, W. ; Muller-Glaser, K.D.
         
        
        
        
        
            Keywords : 
Circuit testing; Current measurement; Electron beams; Electron emission; Magnetic field measurement; Magnetic fields; Monitoring; Semiconductor device measurement; Voltage measurement; Wires;
         
        
        
        
            Conference_Titel : 
Test Conference, 1991, Proceedings., International
         
        
        
            Print_ISBN : 
0-8186-9156-5
         
        
        
            DOI : 
10.1109/TEST.1991.519517