Title :
LSI - The fabricator´s viewpoint
Author :
Lohman, Rowena B.
Author_Institution :
RCA Laboratories, Princeton, NJ, USA
Keywords :
Conductors; Costs; Electronics industry; Integrated circuit reliability; Integrated circuit technology; Laboratories; Large scale integration; Manufacturing; Resistors; Semiconductor device manufacture;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1967 IEEE International
Conference_Location :
Philadelphia, PA, USA
DOI :
10.1109/ISSCC.1967.1154506
