Fundamental characteristics of a small actuator with a magnetically levitated mover

Recently, further improvement of performance of actuators is required to realize high performance and efficient systems. Direct drive of multi-degrees of freedom is one of the expected technologies for the future. This paper deals with a small actuator for multi-degrees of freedom, which has a mover consisting of Halbach permanent magnets and air-core armature conductors arranged in a multi-layers printed circuit board. This paper presents investigation of electromagnetic force characteristics for six degrees of freedom by numerical analysis and stability of the mover motion for six degrees of freedom.