DocumentCode
28455
Title
Special Section on the 2014 International Symposium on Semiconductor Manufacturing
Author
Koike, Hidetoshi
Author_Institution
Imaging Device Engineering Dept.Toshiba Corporation Semiconductor & Storage Products Company Image Sensor Div., Image Sensor and Module Development Group, Kanagawa, Japan
Volume
28
Issue
3
fYear
2015
fDate
Aug. 2015
Firstpage
227
Lastpage
228
Abstract
Semiconductor manufacturing technology is reliant on the sum of the total of engineers’ experiences and the accumulation of know-how and IP. The complexity of the field prevents a shift to the systematization and universalization of technologies. In order to bring breakthroughs in semiconductor manufacturing to reflect changing and challenging new requirements, the International Symposium on Semiconductor Manufacturing (ISSM) was launched in 1992.
Keywords
Meetings; Monitoring; Process control; Semiconductor device manufacture; Special issues and sections;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2015.2453611
Filename
7173096
Link To Document