Title :
A new drive for the micrometer and submicrometer-range
Author :
Budig, P.-K. ; Timmel, H. ; Hofmann, J. ; Peschke, K. ; Schuffenhauer, U. ; Zeumann, R.
Author_Institution :
Tech. Univ. of Chemnitz, Germany
fDate :
Sept. 28 1991-Oct. 4 1991
Abstract :
A drive capable of making motions in the micrometer and even in the submicrometer-range was developed. Its function, principles, and test results are presented. It is shown that it is possible to design a drive system for motion in the micrometer and submicrometer-range which is very simple for the point of view of the motor design, which allows motions over several hundred millimeters to be made, and which produces a high thrust of 80 N. Thrust of several hundred newtons can be realized. The precision is achieved by the use of microelectronic equipment in combination with a very fast three-phase inverter.<>
Keywords :
electric drives; small electric machines; 3-phase invertors; electric drives; microelectronic equipment; micrometer range; small electric machines; submicrometer-range; Clocks; Frequency; Magnetic fields; Microcomputers; Pulse inverters; Pulse width modulation inverters; Soft magnetic materials; Space vector pulse width modulation; Stators; Voltage;
Conference_Titel :
Industry Applications Society Annual Meeting, 1991., Conference Record of the 1991 IEEE
Conference_Location :
Dearborn, MI, USA
Print_ISBN :
0-7803-0453-5
DOI :
10.1109/IAS.1991.178172
